The production system Tetra 100, with its 100 litrechamber volume, PC control and automatic doors, is used in series production(cleaning, etching and activation).

Special plasma system Tetra 100-LF-PC

Technical data:

Switch cabinet:
W 2000 mm, H 2200 mm, D 2000 mm

Chamber:
W 700 mm, H 200 mm, D 700 mm

Chamber volume:
approx. 100 litres

Gas supply:
3 gas channels via MFCs

Generator:
1 piece (40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Control
PC control (Windows) with industrial field bus

Automation:
The system has a drawer door